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Depth of Focus Formula

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Depth of Focus is a critical parameter that influences the tolerance to variations in the height of the semiconductor wafer. Check FAQs

DOF = k 2 \cdot \frac{λ l}{{NA}^{2}}

DOF - Depth of Focus?k₂ - Proportionality Factor?λ_l - Wavelength in Photolithography?NA - Numerical Aperture?

Depth of Focus Example

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Here is how the Depth of Focus equation looks like with Values.

Here is how the Depth of Focus equation looks like with Units.

Here is how the Depth of Focus equation looks like.

1.3013 = 3 \cdot \frac{223}{{0.717}^{2}}

1.3013μm = 3 \cdot \frac{223nm}{{0.717}^{2}}

1.3013 = 3 \cdot \frac{223}{{0.717}^{2}}

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Depth of Focus Solution

Follow our step by step solution on how to calculate Depth of Focus?

FIRST Step Consider the formula

DOF = k 2 \cdot \frac{λ l}{{NA}^{2}}

Next Step Substitute values of Variables

∴

DOF = 3 \cdot \frac{223nm}{{0.717}^{2}}

Next Step Convert Units

∴

DOF = 3 \cdot \frac{2.2E-7m}{{0.717}^{2}}

Next Step Prepare to Evaluate

∴

DOF = 3 \cdot \frac{2.2E-7}{{0.717}^{2}}

Next Step Evaluate

∴

DOF = 1.30133109247621E-06m

Next Step Convert to Output's Unit

∴

DOF = 1.30133109247621μm

LAST Step Rounding Answer

∴

DOF = 1.3013μm

Depth of Focus Formula Elements

Variables

Depth of Focus

Depth of Focus is a critical parameter that influences the tolerance to variations in the height of the semiconductor wafer.

Symbol: DOF

Measurement: WavelengthUnit: μm

Note: Value should be greater than 0.

Formulas to find Depth of Focus

Proportionality Factor

Proportionality Factor is a constant that relates two key parameters: the critical dimension (CD) and the exposure dose.

Symbol: k₂

Measurement: NAUnit: Unitless

Note: Value should be greater than 0.

Formulas to find Proportionality Factor

Wavelength in Photolithography

Wavelength in Photolithography refers to the specific range of electromagnetic radiation employed to pattern semiconductor wafers during the semiconductor fabrication process.

Symbol: λ_l

Measurement: WavelengthUnit: nm

Note: Value should be greater than 0.

Formulas to find Wavelength in Photolithography

Numerical Aperture

Numerical Aperture of an Optical System is a parameter used in optics to describe the ability of an optical system. In the context of semiconductor manufacturing and photolithography.

Symbol: NA

Measurement: NAUnit: Unitless

Note: Value should be greater than 0.

Formulas to find Numerical Aperture

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How to Evaluate Depth of Focus?

Depth of Focus evaluator uses Depth of Focus = Proportionality Factor*Wavelength in Photolithography/(Numerical Aperture^2) to evaluate the Depth of Focus, The Depth of Focus is defined as a critical parameter that influences the tolerance to variations in the height of the semiconductor wafer. It's the range of distances in front of and behind the focal plane where objects appear sufficiently sharp in an image. Depth of Focus is denoted by DOF symbol.

How to evaluate Depth of Focus using this online evaluator? To use this online evaluator for Depth of Focus, enter Proportionality Factor (k₂), Wavelength in Photolithography (λ_l) & Numerical Aperture (NA) and hit the calculate button.

FAQs on Depth of Focus

What is the formula to find Depth of Focus?

The formula of Depth of Focus is expressed as Depth of Focus = Proportionality Factor*Wavelength in Photolithography/(Numerical Aperture^2). Here is an example- 1.3E+12 = 3*2.23E-07/(0.717^2).

How to calculate Depth of Focus?

With Proportionality Factor (k₂), Wavelength in Photolithography (λ_l) & Numerical Aperture (NA) we can find Depth of Focus using the formula - Depth of Focus = Proportionality Factor*Wavelength in Photolithography/(Numerical Aperture^2).

Can the Depth of Focus be negative?

No, the Depth of Focus, measured in Wavelength cannot be negative.

Which unit is used to measure Depth of Focus?

Depth of Focus is usually measured using the Micrometer[μm] for Wavelength. Meter[μm], Megameter[μm], Kilometer[μm] are the few other units in which Depth of Focus can be measured.

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Depth of Focus Formula

Depth of Focus Example

Depth of Focus Solution

Depth of Focus Formula Elements

Other formulas in MOS IC Fabrication category

How to Evaluate Depth of Focus?

FAQs on Depth of Focus

Variable Name