Oxide capacitance after voltage scaling is usually measured using the Nanofarad per Square Centimeter[nF/cm²] for Oxide Capacitance Per Unit Area. Farad per Square Meter[nF/cm²], Microfarad per Square Centimeter[nF/cm²], Microfarad per Square Millimeter[nF/cm²] are the few other units in which Oxide capacitance after voltage scaling can be measured.