Oxide Capacitance after Full Scaling is usually measured using the Microfarad per Square Centimeter[μF/cm²] for Oxide Capacitance Per Unit Area. Farad per Square Meter[μF/cm²], Nanofarad per Square Centimeter[μF/cm²], Microfarad per Square Millimeter[μF/cm²] are the few other units in which Oxide Capacitance after Full Scaling can be measured.