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Integrated Circuits (IC)
Numerical Aperture in Integrated Circuits (IC) Formulas
Numerical Aperture of an Optical System is a parameter used in optics to describe the ability of an optical system. In the context of semiconductor manufacturing and photolithography. And is denoted by NA.
Integrated Circuits (IC) formulas that make use of Numerical Aperture
f
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Critical Dimension
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f
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Depth of Focus
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FAQ
What is the Numerical Aperture?
Numerical Aperture of an Optical System is a parameter used in optics to describe the ability of an optical system. In the context of semiconductor manufacturing and photolithography.
Can the Numerical Aperture be negative?
{YesorNo}, the Numerical Aperture, measured in {OutputVariableMeasurementName} {CanorCannot} be negative.
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