Capacitance of Gate Oxide Layer is usually measured using the Microfarad per Square Millimeter[μF/mm²] for Oxide Capacitance Per Unit Area. Farad per Square Meter[μF/mm²], Nanofarad per Square Centimeter[μF/mm²], Microfarad per Square Centimeter[μF/mm²] are the few other units in which Capacitance of Gate Oxide Layer can be measured.